OS1-10 ジュール・トムソン型マイクロ冷凍機に関する研究(OS1 マイクロエネルギー変換,循環型社会における動力エネルギー技術)

概要

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We made a prototype Joule-Thomson micro-cooler that was fabricated on Si wafer by photofabrication. The micro-cooler in the present study uses ethylene as a refrigerant. Inlet and outlet gas pressures are set to 2.5MPa and 0.1MPa, respectively. There are slits on counter-flow heat exchanger to prevent heat flow to the cold region along Si wafer. Evaporator temperature reached 270K with pressure of 2.5MPa and mass flow of 9.98mg/s, and we confirmed the operation of micro-cooler. We also performed numerical analysis of heat exchanger. It was found that the mass flow rate of the present experiment is too large. The temperature effectiveness can be improved by decreasing mass flow rate and also by decreasing thermal conductivity of solid material.
社団法人日本機械学会の論文
2007-06-13