MNM-4A-1 レーザーアブレーションにより生成したナノ粒子のサイズ選別とCNT生成(セッション 4A ナノ材料と熱工学)

概要

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CNTs (Carbon nanotubes) are synthesized from catalyst metal nano-particles that were generated by laser vaporization in LCCVD (laser vaporized catalytic chemical vapor deposition) technique. In this study, we introduced DMA (Differential Mobility Analyzer) in LCCVD technique in order to observe the effect of catalyst metal nano-particles diameter on CNTs diameter. DMA classify metal nano-particles diameter according to the difference of electrical mobility. Due to this purpose, this study has conducted classification of metal nano-particles and CNTs synthesis from size classified catalyst metal nano-particles. CNTs and the particle diameter distributions of metal nano-particles were observed with FESEM or TEM. The diameter of CNTs was not uniform, and most of them were larger than that of nano-particles classified by DMA. It is considered that the particles on the Si substrate connected mutually when Si substrate was heated in electric furnace and the size of the particle was growing.
2010-10-12