K-1513 デジタル型マイクロスラスタの隔壁に関する基礎研究(J07-2 マイクロ熱流体現象の機能利用デバイス)(J07 マイクロマシン技術と熱流体現象)

概要

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Micro-thruster array is one of promising systems for the emerging nanosatellite project but some problems are left unsettled. In order to use liquid propellant instead of solid, the physical mechanism of micro isolation valve on micro tank is studied. The configuration in each tank is of 3mm diameter and 3mm height and each valvemembrane is the bulk-etched silicon of 10μm thickness and 1mm^2 area. After several attempts, appropriate electrical operation to break such thick membrane is developed. Fabricated gold electrode has a slit on the membrane, yielding high temperature and electric breakdown, both of which are recorded by high-speed camera. The increased pressure in tank is found required to break the membrane effectively.
社団法人日本機械学会の論文
2001-08-22