809 超精密機械加工面へのDLC皮膜の適用

概要

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This paper introduced the effects of substrate finishing conditions using ELID(Electrolytic In-Process Dressing)grinding to improve adhesive strength of DLC film. The results clearly demonstrated that increasing the top surface hardness using the proposed grinding method was able to improve the adhesive strength. The increase in hardness and the improved adhesion strength are believed to be the result of a surface modifying mechanism in which abrasive elements penetrate and diffuse through the substrate during the grinding process. Additionally, this paper also introduced DLC coated metal mold, micro tool and measurement probe for ultra-precision mechanical fabrication.
社団法人日本機械学会の論文
2006-09-14