2613 大型自由形状面超精密仕上げツールの開発 : 第1報:大型非球面形状加工プロセスの提案(S74-1 砥粒加工(1),S74 砥粒加工)

概要

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The ELID-grinding R&D activities on development of large optics for astronomical observatory and semiconductor fabrication, have been accelerated in these years. The authors developed the large aspheric nanoprecision ELID-grinders such as "L-uaoe-GIC", "N-aou-VEL", etc. for these purposes. In this paper, the authors introduce the examples of ELID-ground large mirrors and the new turning grinding method with the exclusive large and indexable rotary table which was newly developed specifically for fabrication of large telescope mirror segments efficiently. The developed rotary table was successfully mounted on a large aspheric ELID-grinder. A new additional finishing process method was also devised on the machine.
社団法人日本機械学会の論文
2005-09-18