1402 ELID研削システム搭載卓上型マイクロツール加工システムの開発(S78-1 高機能研削加工(1),S78 高機能研削加工)

概要

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High dimensional accuracy is increasingly difficult to achieve because of the effects of surface roughness and waviness. In particular, nanometer-level control of configuration accuracy and surface roughness is needed in optical system components. With growing demands for new micro-fabrication technologies capable of ultraprecise and highly accurate machining of hard materials to produce parts, the principal techniques of micro-grinding such as ELID (electrolytic in-process dressing)^[1-5] are expected to become very important. The construction of desk-top fabrication systems and tools based on the concept of applying small processing machines to the fabrication of small parts is therefore considered essential. In our research we have developed several desktop micro-grinding machines that provide several dedicated processing functions. This study evaluates the performance of these machines, focusing primarily on a new desk-top micro tool processing unit for development of fine tools.
一般社団法人日本機械学会の論文
2006-09-15