Monolayer Nitridation of Si(001) Surfaces
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-04-30
著者
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徳本 洋志
独立行政法人産業技術総合研究所
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TOKUMOTO Hiroshi
Electrotechmical Laboratory
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Tokumoto Hiroshi
Joint Research Center for Atom Technology, National Institute for Advanced Interdisciplinary Researc
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Morita Yukinori
Joint Research Center For Atom Technology (jrcat):national Institute Of Advanced Industrial Science
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Morita Yukinori
Joint Research Center For Atom Technology (jrcat)-national Institute For Advanced Interdisciplinary
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Tokumoto Hiroshi
Jrcat National Institute For Advanced Interdisciplinary Research
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Tokumoto Hiroshi
Elecltrotechnical Laboratory
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Tokumoto Hiroshi
Electrotechnical Laboratory (etl)
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Tokumoto Hiroshi
Joint Research Center For Atom Technology (jrcat)
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Tokumoto Hiroshi
Joint Research Center For Atom Technology (jrcat):national Institute Of Advanced Industrial Science
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Tokumoto Hiroshi
Joint Research Center For Atom Technology (jrcat)-national Institute Of Advanced Industrial Science
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Ishida Takashi
Optical Disk Systems Development Center Matsushita Electric Industrial Co. Ltd.
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ISHIDA Takao
National Institute of Advanced Industrial Science and Technology (AIST)
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