Cross-Sectiomal Scanning Tunneling Microscopy on Cleaved Si(111):Observation of Novel Reconstruction and Structural and Electrical Properties of MOS Interface
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概要
- 論文の詳細を見る
Cross-sectional scanning tunneling microscopy (XSTM) measurements revealed two types of reconstructions on Si(111) surfaces depending on the cleaving conditions. The first one is a 2×1 structure consistent with previous reports. The second one is a novel 8×1 structure, which shows a missing-row structure where one row is missing in every four rows in the 2×1 structure. We propose a model for the missing-row reconstruction seen on the Si(110) surface. XSTM observation of the metal-oxide-semiconductor (MOS) interface structure clearly showed a fractured metal layer and cleaved Si areas which demonstrated the possibility of observing the interface with atomic resolution. Scanning tunneling spectroscopy (STS) measurement of the Si part showed systematic shifts of the spectra with the application of bias voltage between the metal and the Si, which agreed well with the expected band bending in the Si.
- 社団法人応用物理学会の論文
- 1996-06-30
著者
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Komeda Tadahiro
Joint Research Center For Atom Technology (jrcat) Angstronn Technology Partnership (atp)
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Tokumoto Hiroshi
Joint Research Center For Atom Technology (jrcat)
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Gwo Shangjr
Joint Research Center For Atom Technology (jrcat) Angstronn Technology Partnership (atp)
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Tokumoto Hiroshi
Joint Research Center For Atom Technology (jrcat) National Institute For Advanced Interdisciplinary
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