1721 機械構造物の安心・安全評価のための多機能化SAWデバイスセンサの設計と基本特性(J08-5 材料・構造,デバイス(1),J08 知的材料・構造システム)

概要

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As a first step toward safety monitoring system for environmental condition and mechanical damage of infrastructures with active and embedded nondestructive evaluation module etc. a multi-functional SAW (surface acoustic wave) device was developed and its dependency on environmental parameters such as temperature, stress/strain and cyclic loadings etc. was investigated. On the surface part between IDTs, environmentally active material films were sputtered by magnetron-sputtering technique. In this study, two kinds of shape memory alloys (SMA) system were formed. The measuring acoustic wave parameters of signal amplitude and phase change were chosen to measure as the sensing parameters. As a result, temperature, stress and phase transformation in SMA depending temperature could be measured by the proposed multi-functional SAW.
一般社団法人日本機械学会の論文
2005-09-18