1327 ナノ結晶Pd系成膜SAWデバイスによる溶存水素センサの研究開発(J14-6 知的材料・構造システム(6) 圧電・磁歪センサ,ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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As a first step toward safety monitoring system for environmental condition and mechanical damage of infrastructures with active and embedded nondestructive evaluation module etc. a multi-functional SAW (surface acoustic wave) sensor device was developed especially for hydrogen concentration measurement in the hydrogen melted solution. On the surface part between IDTs, environmentally active material films of two kinds of hydrogen storage alloys were sputtered by magnetron-sputtering technique. The measuring acoustic wave parameters of signal amplitude and phase change were chosen to measure as the sensing parameters. As a result, hydrogen concentration in water solution could be measured by the proposed multi-functional shear-horizontal SH-SAW sensor using Pd-based alloy thin films.
社団法人日本機械学会の論文
2008-08-02