2718 Pt基金属ガラスのナノインプリント成形特性(G04-1 機械材料・材料加工(1),G04 機械材料・材料加工)

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Metallic glasses are amorphous structured materials and exhibit perfect Newtonian viscous flow in the supercooled liquid state and superior nano-formability under very low stresses, since the materials are most useful materials for nanoimprint, a promising method for mass production of micro- and nano-devices with low cost. In the previous study, we fabricated the nano-dies with periodic structure of 50nm or less in intervals by FIB assisted CVD and Reactive Ion Etching (RIE) of SiO_2, and by using these dies, nanoimprint of Pt-based metallic glass was performed. We observed traces of slip at nanoimprinted area on the surface of the specimen due to the macroscopic material flow associated with vertical compressive deformation. In the present paper, we have studied the effect of thickness of a specimen on nanoimprintability and effect of wettability between the metallic glass and die materials. The results demonstrate the performance of the metallic glass for fabrication of nanodevices such as a patterned media.
社団法人日本機械学会の論文
2007-09-07