204 バイモルフ型磁歪薄帯アクチュエータ素子の変位特性(マルチフェロイクス)

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Giant magnetostrictive Fe-Ga alloys are expected as actuator/sensor materials with high respective velocity and huge stress created by the magnetostriction. In order to develop magnetostrictive material induced by low magnetic field, we investigated magnetostrictive (positive magnetostriction/negative magnetostriction) bimorph-layers, that is, Fe_<8O>Ga_<20> ribbon (146μm)/Ni(14μm) film by magnetron sputtering system. The Fe_<8O>Ga_<2O> ribbon was prepared by rapidly solidification. Magnetostrictive property of the cantilever-type foil was measured using an optical lever method. Displacement of the upper part of the foil with length of 22mm was 530μm under low steady magnetic field of 500Oe (40kAm^<-1>) and exhibits little hysteresis. These magnetostrictive properties also are maintained under low frequency of alternating magnetic field. Moreover, the displacement of the foil at the mechanical resonance frequency exhibits a peak and reaches to 2.0mm at week magnetic field of 50Oe (4kAm^<-1>). The magnetostrictive bimorph-layers are useful for application in micro device as micro-pomp.
2006-11-25