917 超音波共振/レーザー法によるナノ結晶ダイヤモンド薄膜の弾性定数測定と欠陥評価(GS-3,16 薄膜(2),研究発表講演)

概要

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We measured the elastic constants of nanocrystalline-diamond (NCD) thin films and microcrystalline-diamond (MCD) thin films deposited on a silicon substrate by the chemical-vapor-deposition (CVD) method using resonant-ultrasound spectroscopy coupled with laser-Doppler interferometry. The elastic constants of the diamond thin films are smaller than those of a bulk diamond and the elastic constants of the NCD films are smaller than those of the MCD films. The elastic constants of the NCD film show a thickness dependence; thinner NCD films show smaller moduli. We attribute the elastic constants to incohesive bonds at grain boundaries and presence of thin graphite and amorphous diamond phases, which are suggested by Raman spectroscopy. The modified elastic constants are explained by a micromechanics modeling.
2005-03-18