CVD ダイヤモンド膜の異方性弾性定数の測定とマイクロメカニクスモデリング

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This paper studies the anisotropic elastic constants of a CVD polycrystalline diamond film using acoustic spectroscopy and micromechanics modeling. Many films exhibit elastic anisotropy between the film-growth direction and in-plane direction and possess five independent elastic constants ; they are C_<11>, C_<33>, C_<12>, C_<13> and C_<44> when the x_3 axis is along the film-growth direction. Combination of resonance ultrasound spectroscopy (RUS) and electromagnetic acoustic resonance (EMAR) deduces the four independent elastic constants among them, including C_<44> and C_<66>, with which the elastic anisotropy is discussed. We found 5-10% anisotropy between them and considerably small elastic constants compared with an isotropic polycrystalline diamond. We attribute the anisotropy and small elastic constants of the CVD diamond film to local incomplete cohesion. This view is supported by a micromechanics calculation.
社団法人日本材料学会の論文
2003-10-15