電磁超音波共鳴法およびRUS/レーザー法によるアモルファス合金薄膜の弾性定数測定(<特集>マイクロマテリアル)

概要

論文の詳細を見る
We have measured the complete set of elastic moduli C_<ij> of an Fe-Si-B amorphous-alloy thin film using thickness resonance with electromagnetic acoustic resonance (EMAR) and newly developed resonance ultrasound spectroscopy (RUS)/laser methods. From the thickness-resonance measurements, out-of-plane shear moduli (C_<44> and C_<55>) were found to be 73.2 and 71.0(GPa). This indicates that the amorphous-alloy thin film shows transverse-isotropy elastic symmetry. RUS/laser measurements gave the remaining moduli: C_<11> = 193.6, C_<33>=234.3, C_<23>=72.1, C_<12>=79.8 and C_<44>=72.1(GPa). From the ratios of the elastic modulus, (C_<33>/C_<11>=1.21 and C_<44>/C_<66>=1.26), the amorphous Fe-Si-B thin film shows elastic anisotropy between in-plane and the out-of-plane directions in the range of 20-30%. These results also indicate that this ultrasonic technique is also applicable for measuring all C_<ij> of other thin films.
2005-10-15