2905 レーザフォーミングによるガラス及び単結晶シリコン箔の曲げ加工(S31-1 新技術への取り組み,S31 塑性加工技術の動向とその展開)

概要

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Borosilicate glass and single crystal silicon foils were V bent by means of laser forming. Since those materials are brittle at room temperature, it is necessary to form plastically at high temperature. Since foils are heated up rapidly by laser irradiation, it is easy to heat foils. In the forming of borosilicate glass foils, a resistant heater was used accessorily to heat the foils up. A 20W Q-switched YVO_4 laser was employed with the frequency of 200kHz. Bending angles were investigated by changing laser power, scanning velocity and defocus length. In forming of borosilicate glass foils, when laser power was 12W, scanning velocity was smaller and defocus length was 8mm, borosilicate glass foils was bent maximum. In forming of single crystal silicon foils, when laser power was 13W, scanning velocity was 15mm/s and defocus length was 5mm, maximum bending angle was obtained.
一般社団法人日本機械学会の論文
2006-09-15