119 Ni-P アモルファス合金薄膜の異方性弾性率テンソルの測定と膜組織のマイクロメカニックス評価

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This study presents a complete set of effective elastic-stiffness coefficients of an Ni_<80>P_<20> amorphous-alloy thin film deposited on an aluminum-alloy substrate by electroless plating. The film thickness was 12 micrometers. The electromagnetic-acoustic-resonance method detected resonance frequencies of the triple-layered specimens (film/substrate/film), which enabled us to determine all five independent elastic-stiffness coefficients of the film using known substrate elastic properties. The resulting coefficients were those of a transverse isotropic material. There was strong anisotropy between the in-plane and normal directions; the in-plane Young's modulus is larger than the normal Young's modulus by 34%, for example. The anisotropic coefficients can be interpreted by considering a micromechanics model for local incomplete cohesion (thin ellipsoidal voids) aligned parallel to the film surface.
2002-10-10