1505 ブリルアン振動を用いた酸化物薄膜のサブテラヘルツ帯の音響特性評価(S10-1 非破壊評価とモニタリングI,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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We studied the acoustic properties at sub-THz frequencies of SiO_2 amorphous thin films. SiO_2 amorphous thin films were prepared by reactive sputtering of Si target in argon/oxygen mixture with various conditions. We measured Brillouin oscillation frequency using a femtosecond pump-probe method. We determined the longitudinal sound velocity from measured frequency and refractive index measured by ellipsometry. The results show that the velocities of SiO_2 amorphous thin films highly depend on the microstructure such as microcracks and texture. Thus, this indicates that Brillouin oscillation technique is an effective tool of evaluation for not only acoustic properties but also reliability for transparent materials.
社団法人日本機械学会の論文
2008-08-02