2002 レーザー励振音響フォノン共鳴法の開発と銅ナノ薄膜の弾性定数測定(G03-1 測定・検出・評価技術(1),G03 材料力学)

概要

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We developed the laser acoustic-phonon resonance spectroscopy for measuring the elastic modulus of ultrathin films. This method determines the out-of-plane elastic modulus by measuring the resonance frequency of acoustic phonons in thin films using the ultrashort-pulse laser, which allow us to determine the elastic modulus of thin films thinner than 100nm. In this study, we applied this method to Cu thin film deposited on Si substrates, and we found that epitaxially grown Cu thin films showed extremely stable elasticity: the out-of-plane elastic constant C_<33> was independent of the film thickness in the thickness range of 19-100nm and it was hardly affected by the annealing, despite the observation that the Cu thin film was highly strained due to the lattice mismatch with the substrate.
社団法人日本機械学会の論文
2007-09-07