433 曲げ共振を利用した薄膜の疲労試験(T09-2 微小機械システムにおけるマイクロ・ナノ力学(2) 単結晶シリコンの力学特性,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Fatigue properties of thin film materials are extremely important to design durable and reliable MEMS devices. However, it is rather difficult to apply conventional fatigue testing method of bulk materials to thin films. Therefore, a new fatigue testing method fitted to thin film materials is required. In this investigation, we have developed a fatigue testing method that uses resonance of ribbon type thin films and enables to shorten fatigue testing time. The testing machine consists of audio speaker as an actuator, a laser displacement meter, function generator and audio amplifier. Ribbon type specimens were fixed to a specimen holder that is connected to speaker cone, and resonated by applying sine wave to the speaker. Resonance fatigue tests were carried out using Ni-P amorphous alloy thin films and Au foils. The fatigue tests were completed successfully, and S-N curves were obtained for Ni-P amorphous alloy thin films and Au foils.
2008-08-02