Device Performance Improvement Based on Transient Enhanced Diffusion Suppression in the Deep Sub-Quarter Micron Scale
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-04-30
著者
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Lee Deok-hyung
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Kim H‐s
Sung Kyun Kwan Univ. Suwon Kor
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Kim H‐s
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Ahn Jong-hyon
Cpu Technology Team Samsung Electronics Co. Ltd.
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Suh Kwang-pyuk
Cpu Technology Team Samsung Electronics Co. Ltd.
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Lee S‐c
National Taiwan Univ. Taipei Twn
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Lee D‐h
Yonsei Univ. Seoul Kor
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Lee Shih-chang
Department Of Electrophysics National Chiao Tung University
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Lee S‐c
Hyundai Electronics Ind. Co. Ltd. Kyoungki‐do Kor
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Yoo Kwang-dong
Cpu Technology Team Samsung Electronics Co. Ltd.
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KIM Hyun-Sik
CPU Technology Team, Samsung Electronics Co., Ltd.
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LEE Duk-Min
CPU Technology Team, Samsung Electronics Co., Ltd.
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LEE Soo-Cheol
CPU Technology Team, Samsung Electronics Co., Ltd.
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