Sub-100nm Lithographic Performance of Novel Electron Beam Resist
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概要
- 論文の詳細を見る
- 社団法人電子情報通信学会の論文
- 1999-07-22
著者
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BAIK Ki-Ho
Semiconductor Research Div., Hyundai Electronics Industries Co. Ltd.
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白 基鎬
Semiconductor Research Div. Hyundai Electronics Industries Co. Ltd.
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KIM Hyeong-Soo
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co. Ltd.
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Baik K‐h
Hyundai Electronics Ind. Co. Ltd. Kyungki‐do Kor
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Kim H‐s
Sung Kyun Kwan Univ. Suwon Kor
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Kim H‐s
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Hong Sung-eun
Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Baik Ki-ho
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd.
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JUNG Jae-Chang
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co. Ltd.
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Jung J‐c
Hyundai Electronics Ind. Co. Ltd. Kyoungki‐do Kor
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Ahn Jae-yong
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd.
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Roh Chi-hyeong
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd.
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Kim Hyeong-soo
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd.
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Hong Sung-Eun
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd.
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