Effect of Additive Gases on Dimension Control during Cl_2-Based Polysilicon Gate Etching
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-07-15
著者
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BAIK Ki-Ho
Semiconductor Research Div., Hyundai Electronics Industries Co. Ltd.
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Baik Ki-ho
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd.
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LEE Ho-Seok
Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd.
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JUN Bum-Jin
Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd.
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LEE Dong-Duk
Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd.
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SEOL Yeo-Song
Semiconductor Research Division, Hyundai Electronics Industries Co., Ltd.
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Seol Yeo-song
Semiconductor Research Division Hyundai Electronics Industries Co. Ltd.
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Lee Ho-seok
Semiconductor Research Division Hyundai Electronics Industries Co. Ltd.
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Jun Bum-jin
Semiconductor Research Division Hyundai Electronics Industries Co. Ltd.
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Lee Dong-duk
Semiconductor Research Division Hyundai Electronics Industries Co. Ltd.
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Lee Dong-duk
Semiconductor R&d Laboratories 1. Hyundai Electronics Industries Co. Ltd
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