Synthesis and Characterization of Alicyclic Polymers with Hydrophilic Groups for 193 nm Single-Layer Resist
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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BAIK Ki-Ho
Semiconductor Research Div., Hyundai Electronics Industries Co. Ltd.
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白 基鎬
Semiconductor Research Div. Hyundai Electronics Industries Co. Ltd.
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Baik K‐h
Hyundai Electronics Ind. Co. Ltd. Kyungki‐do Kor
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Jung M‐h
Samsung Electronics Co. Ltd. Gyungki‐do Kor
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Baik Ki-ho
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd.
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JUNG Min-Ho
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co. Ltd.
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JUNG Jae-Chang
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co. Ltd.
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LEE Geunsu
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co. Ltd.
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Jung J‐c
Hyundai Electronics Ind. Co. Ltd. Kyoungki‐do Kor
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Jung Min-ho
Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Lee G
Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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