マイクロTAS用試薬供給モジュールの開発(OS.12 機能性マイクロデバイスの創製・評価)

概要

論文の詳細を見る
A Reagents Supply Chip for Micro TAS/Bio-MEMS was developed in this study. The chip consists of 5 channels of micro-pumps for supplying and mixing reagents and samples, and buffering the ones with multi-valves for switching volumes. The chip was made of Si and glass by using surface machining and anode bonding. The pump is designed with two PZT-driven diaphragms and diffusers. The reagents and samples are transported into buffering channel by driving the pump and the volume was control by switching corresponding valves. The pumps have transport flow rate of 100mm/min with high precision and reproducibility. By controlling the driven power, the reagents with different viscosity can be transported in same rate and mixed at outlet of pumps. The reagents and samples in the buffering channel, then, transported into reaction chips by using a plunger pump.
一般社団法人日本機械学会の論文
2004-03-03