20305 金属MEMS用マイクロ深絞りにおける金型表面性状と成形特性(OS14 機能性マイクロデバイスの創製・評価)

概要

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This research aims to investigate how the tool roughness influences the formed cup accuracy and forming characteristics in micro-cup drawing and to collect the data for a micro-die design guideline. In this paper, a specially designed micro deep-drawing machine system is developed to control a very small force applied on blank holder and punch during the deep drawing process. Stainless steel and phosphor bronze thin sheets of 20μm thickness are used in the experiment. The die cavity diameter for cup drawing is 700μm. Experimental results with several tool conditions show that the developed machine system has enough forming characteristic performance for micro forming and tool positioning accuracy significantly affects the forming characteristics in the micro forming process.
一般社団法人日本機械学会の論文
2005-03-17