5508 金属材料マイクロポンプの創製と特性評価(J19-2 マイクロメカトロニクス(2),J19 マイクロメカトロニクス)

概要

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Recently, the attention of micro-pump which is one of micro-fluidic devices has increased. Micro-pump is expected to use to be application of biological and medical fields. In this research, we fabricated a metallic micro-pump by metal forming. Metal forming has been available to process and to fabricate in high precision. In addition, the metallic materials, such as Ti or SUS have high ability of biocompatibility and chemical resistance. A bi-metal with thickness of 60μm was employed on pumping actuator. This bi-metal actuator was fabricated in three-dimensional configuration by metal forming, in order to increase displacement magnitude by buckling. In fluid channel, passive valves were installed in inlet and outlet, and a slit-structure was fabricated for suspension of valve plate with a proper stiffness. By this means, we fabricated all metallic micro-pump, and evaluated volumetric flow. In the result, it achieved maximum flow of 1.62μl/min.
一般社団法人日本機械学会の論文
2006-09-15