T1602-3-4 鍛造によるチタン薄材表面の微細成形([T1602-3]マイクロナノ理工学:nmからmmまでの表面制御とその応用(3))

概要

論文の詳細を見る
The purpose of this study is to establish a new micro forming technology for micro-electro-mechanical systems (MEMS) devices, such as micro-pumps, valves, and micro forceps for medical applications. The sheets metal and foil materials are generally used for the fabrication of metal MEMS with the technology of micro-forming. Since the fabrication of MEMS devices requires nano/micro-level precision, surface roughness of sheets metal becomes a predominant problem. In this study, surface modification of titanium and phosphor bronze C5191 sheets with thickness of 100μm by micro-forging was performed. Moreover, vertical vibrations were applied by a PZT actuator while the sheets metal were micro-forged, in order to effectively deform only surface asperities in the sheets metal. Initial load and applied frequency were evaluated to establish the better micro-forging condition for surface modification of sheets metal. The surface roughness of titanium and phosphor bronze sheets metal were successfully reduced by 48% and 76% with the frequency of 1000 and 500 Hz and the initial load of 300 and 20 N respectively.
2010-09-04