低コヒーレンス位相シフト干渉法を用いたナノ分子膜の三次元画像計測(情報機器コンピュータメカニクス1 -ヘッド・ディスク・インターフェース,IIP2004 情報・知能・精密機器部門講演会)

概要

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Low-coherence phase-shifting interferometry is presented for measuring spreading of a molecularly thin lubricant film. This method provides lubricant distribution in three dimensions from calculation using phase-shifted two-dimensional interferograms. As light source, low-coherence white light was employed, demonstrating a remarkable effect on suppressing image noise as compared with a laser. The phase-shifting function was realized by attaching a high-precision piezo actuator to the reference surface of the interferometer. To prevent fringe drift induced by mechanical vibration, the signal of fringe position detected by a position sensitive detector was used for feedback control of the piezo actuator. By accurately driving the position sensitive detector, high-precision phase shift was realized even in the presence of vibration. The applicability of the low-coherence phase-shifting interferometry was confirmed by measuring a nanometer-order-thick lubricant film on a diamond-like carbon surface.
2004-03-22