F-1312 透過型マイケルソン干渉を利用した較正不要なヘッド浮上すきまの測定法(S47-3 ヘッド・ディスク・インタフェース)(S47 情報機器コンピュータメカニクス)

概要

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A novel spacing measurement using the Michelson laser interferometry was enhanced to permit a direct measurement of head-disk spacing without necessity of calibration. This method utilizes the phase comparison of two kinds of interference fringe patterns formed over the slider lubricating surface and the inner back surface of a glass disk. To increase resolution and reproducibility, three principal techniques were newly introduced; an optical system mounting a hi-definition CCD camera, a wobbling technique to capture fringe image, and powerful ridgeline extraction from the fringe pattern. Finally, the measured spacing and the calculated spacing were found to be in good accordance, indicating the present method to be applicable to the practical usage.
2001-08-22