レーザ干渉を用いたヘッドディスクのすきま測定における測定誤差の評価

概要

論文の詳細を見る
Analytical and simplified method was developed for predicting error propagation encountered in measuring head-to-medium spacing in magnetic disk drives. Two kinds of optical interferences observed between the flying head and the glass disk replaced with the magnetic disk were considered: One is the homodyne interferometry wherein the spacing is obtained from light intensity variation due to the interference. The other is the polarization interferometry in which the spacing is determined through phase difference between the parallel and perpendicular components of polarized light. To analytically predict the amount of error propagation, the detected signal is essential to be presented as the functions of its maximum or minimum value that determine the calibration curve. For this purpose, two kinds of accurate and useful approximations were introduced for the homodyne interferometry and for the polarization interferometry, respectively. Using these approximations, the calibration curves were presented as the functions of the detected signal and its extremum. Calculation examples were demonstrated for typical head-medium interface conditions and contribution of error components to the error in measured spacing was clarified.
一般社団法人日本機械学会の論文
1999-01-25