マイケルソン顕微干渉法による浮動ヘッドの浮上すきまと姿勢の三次元画像計測

概要

論文の詳細を見る
In situ measurement of head flying height and attitude using image processing on fringe patterns formed by Michelson interferometry is studied. A wide laser beam is applied to a slider back surface and a disk surface simultaneously to create interferometric fringe patterns on them. Employing the relationships between two fringe patterns, a calculation procedure is formulated to yield slider parallel, pitch and roll displacements. Experimental fringe patterns are taken in a single visual field by a high-speed CCD camera. Then, image processing for higher signal-to-noise ratio, such as smoothing/filtering, amplification and peak line detection is applied to the image data. Additionally, average processing with respect to multiple fringe lines to produce higher accuracy is successfully applied. Measured values of flying height and pitch/roll displacements are confirmed to be in good agreement with calculation data, demonstrating excellent applicability of the present method down to near-contact region.
一般社団法人日本機械学会の論文
1995-10-25