マイケルソン顕微干渉法を用いた磁気ディスク表面における潤滑膜流動の二次元画像計測

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A Michelson interferometer has been constituted and applied to the measurement of lubricant spreading on a magnetic disk surface. Performing image processing on the fringe patterns formed by the interferometer, the lubricant thickness, as well as the spreading behavior can be investigated. This method provides complete line profiles in two dimensions and permits direct observation of the spreading phenomena, in contrast to the conventional point-by-point scanning method. To improve the measurement accuracy, a fringe following technique and a noise suppression technique were introduced. The fringe following technique successfully prevented a fringe drift over the visual filed and thus suppressed the pseudo phase shift caused by the drift. The spatially fixed noise due to non-uniform laser beams and flaws in optical components was also efficiently suppressed by the noise compensation method. From the calculation of multiple beam interference in a stratified medium, it is found that the sensitivity is dramatically enhanced if the lubricant is coated on the back side of a disk instead of the front side. Utilizing this advantage, a novel scheme was employed to give maximum sensitivity, in which lubricant was observed through a glass disk whose front surface was coated with anti-reflection film and whose back surface was sputtered with the proper thickness of DLC. The enhanced resolution attained by the new scheme was experimentally confirmed by observing the lubricant on the front surface and the back surface of the glass disk.
一般社団法人日本機械学会の論文
2000-11-25

マイケルソン顕微干渉法を用いた磁気ディスク表面における潤滑膜流動の二次元画像計測

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