Effects of Deposition Pressure on the Properties of a Low-Dielectric Constant Cyclohexane-based Plasma Polymer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-03-15
著者
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Jung D
Sungkyunkwan Univ. Suwon Kor
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Jung Donggeun
Department Of Physics Brain Korea 21 Physics Research Division Institute Of Basic Science And Center
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Jung Donggeun
Department Of Physics And Institute Of Basic Science Sungkyunkwan University
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Quan Y
Sungkyunkwan Univ. Suwon Kor
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YEO Sanghak
Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, and Cen
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QUAN Yong
Department of Physics and Institute of Basic Science, Sungkyunkwan University
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JOO Jongryang
Department of Physics and Institute of Basic Science, Sungkyunkwan University
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Jung Donggeun
Department Of Physics Brain Korea 21 Physics Research Division And Institute Of Basic Science Sun Gl
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Quan Yong
Department Of Physics And Institute Of Basic Science Sungkyunkwan University
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Kim Sang
Department Of Physics And Institute Of Basic Science Sungkyunkwan University
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Yeo Sanghak
Department Of Physics Brain Korea 21 Physics Research Division Institute Of Basic Science And Center
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Joo Jongryang
Department Of Physics And Institute Of Basic Science Sungkyunkwan University
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