Temperature Dependence of Dielectric Absorption Current of SrTiO_3 Thin-Film Capacitor
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概要
- 論文の詳細を見る
Temperature dependence of dielectric absorption current of the Pt/SrTiO_3/Au capacitor was investigated. The time dependence of the dielectric absorption currents obtained from I-t measurements for the time window between 1 and 50 s can be fitted by a superposition of three Debye-type relaxations. Relaxation time constant and capacitance which characterize each relaxation species show different temperature dependences. Relaxation time constants are independent of temperature. On the other hand, relaxation capacitances obey Arrhenius' equation with the same activation energy of 0.18 eV. This low activation energy suggests that the observed dielectric absorption current is electronic. Possible mechanisms for the observed dielectric relaxation are discussed based on these results.
- 社団法人応用物理学会の論文
- 1995-10-01
著者
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Fukuda Y
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Fukuda Y
Department Of Physics Faculty Of Science Kobe University
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Kakimi A
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Numata K
The Authors Are With Memory Research & Development Center Texas Instruments Inc.
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Nishimura Akitoshi
The Authors Are With Memory Research & Development Center Texas Instruments Inc.
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FUKUDA Yukio
ULSI Technology Center, Texas Instruments Japan Limited
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NUMATA Ken
ULSI Technology Center, Texas Instruments Japan Limited
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AOKI Katsuhiro
ULSI Technology Center, Texas Instruments Japan Limited
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NISHIMURA Akitoshi
ULSI Technology Center, Texas Instruments Japan Limited
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