Current-Voltage Characteristics of Electron-Cyclotron-Resonance Sputter-Deposited SrTiO_3 Thin Films (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
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概要
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Current-voltage characteristics of SrTiO_3 thin films prepared on Pt electrodes by electron-cyclotron-resonance sputtering have been studied. The leakage current characteristics of the films show an ohmiclike conduction for electric field strengths lower than about 1 MV/cm, while the leakage current for higher electric field strengths is limited by Schottky emission. These ohmiclike leakage characteristics in the low-electric-field region show strong dependences on the measurement conditions, namely, the values of voltagestep and measurement delaytime in the conventional stepwise current-voltage ramps. This result is attributed to the absorption current due to the dielectric relaxation phenomena of the SrTiO_3 capacitor. The overall current-voltage characteristics can be explained by Schottky emission from the Pt electrode.
- 社団法人応用物理学会の論文
- 1994-09-30
著者
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Fukuda Y
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Fukuda Y
Department Of Physics Faculty Of Science Kobe University
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Kakimi A
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Numata K
The Authors Are With Memory Research & Development Center Texas Instruments Inc.
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Nishimura Akitoshi
The Authors Are With Memory Research & Development Center Texas Instruments Inc.
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FUKUDA Yukio
ULSI Technology Center, Texas Instruments Japan Limited
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NUMATA Ken
ULSI Technology Center, Texas Instruments Japan Limited
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AOKI Katsuhiro
ULSI Technology Center, Texas Instruments Japan Limited
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NISHIMURA Akitoshi
ULSI Technology Center, Texas Instruments Japan Limited
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