Preparation of <100>-oriented Lead-Zirconate-Titanate Films by Sol-Get Technique
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概要
- 論文の詳細を見る
A sol-get technique to control the crystalline orientation of lead-zirconate-titanate (PZT) films on Pt/Ti/SiO_2 /Si substrates has been studied. It is found that crystalline orientations of sintered films show strong dependence on their thicknesses and <100>-oriented films can be obtained by limiting their thicknesses to 100 nm. It is also found that thicker oriented films can be obtained by stacking up these oriented films. The scanning electron microscopy observation reveals that a well-oriented film surface is smoother than those of non oriented ones. The leakage current of the 240-nm-thick oriented film is about 7 nA/cm^2 at 3 V, which is an order of magnitude lower than the best reported lanthanum and iron-doped PZT film.
- 社団法人応用物理学会の論文
- 1993-09-30
著者
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Fukuda Y
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Fukuda Y
Department Of Physics Faculty Of Science Kobe University
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Kakimi A
Texas Instruments Tsukuba Res. And Dev. Center Ltd. Ibaraki Jpn
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Nishimura Akitoshi
The Authors Are With Memory Research & Development Center Texas Instruments Inc.
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FUKUDA Yukio
ULSI Technology Center, Texas Instruments Japan Limited
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AOKI Katsuhiro
ULSI Technology Center, Texas Instruments Japan Limited
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NISHIMURA Akitoshi
ULSI Technology Center, Texas Instruments Japan Limited
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