Fabrication of Periodic Submicron Dot Structures of N-InP by Laser-Induced Surface Electromagnetic Wave Etching
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-07-15
著者
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OBARA Minoru
Department of Electronics and Electrical Engineering, Faculty of Science and Technology, Keio Univer
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EZAKI Mizunori
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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KUMAGAI Hiroshi
Laser Technology Laboratory, RIKEN (The Institute of Physical and Chemical Research
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Obara M
Keio Univ. Yokohama Jpn
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Obara Minoru
Department Of Electrical Engineering Faculty Of Engineering Keio University
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Ezaki M
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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KUMAGAI Hiroshi
National Institute of Information and Communications Technology
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Kumagai H
Laser Technology Laboratory The Institute Of Physical And Chemical Research (riken)
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Kuroiwa H
National Institute Of Information And Communications Technology
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TOYODA Koichi
Laser Science Group, The institute of Physical and Chemical Research (RIKEN)
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EZAKI Mizunori
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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Obara M
Laser Science Group The Institute Of Physical And Chemical Research (riken):(present Address)departm
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Kumagai H
National Institute Of Information And Communications Technology
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Toyoda Koichi
Laser Science Group Institute Of Physical And Chemical Research Wako
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Kumagai Hiroshi
Laser Technology Laboratory Riken (the Institute Of Physical And Chemical Research)
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Kumagai Hiroshi
Laser Science Research Group, The Institute of Physical and Chemical Research (RIKEN)
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