A High-Efficiency, High-Repetition-Rate KrF(B→X) Excimer Lamp Excited by Microwave Discharge
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概要
- 論文の詳細を見る
KrF(B→X) fluorescence pulses of 5-9-μs pulse duration with 55-kHz operation frequency were produced from a microwave-discharge-pumped KrF mixture. A high average KrF fluorescence power of 43 W was obtained with an intrinsic efficiency of 12.5% when the average microwave power of 341 W was deposited into the 25-Torr mixture of 2%F_2/1%Kr/48.5%He/48.5%Ne. We also obtained a peak KrF fluorescence power of 215 W with a power efficiency of 15.9%.
- 社団法人応用物理学会の論文
- 1989-12-20
著者
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Obara Minoru
Department Of Electrical Engineering Faculty Of Engineering Keio University
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Obara Minoru
Department Of Electrical Engineering Faculty Of Science And Technology Kelo University
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Kumagai Hiroshi
Department Of Radiology University Of Yamanashi
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Kumagai Hiroshi
Department Of Electrical Engineering Faculty Of Science And Technology Kelo University
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