Imaging of a Diffused Region in a Si Tr-Chip by Electron-Acoustic Microscopy (EAM) : Ultrasonic Imaging and Microscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-06-20
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関連論文
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- A Study of Silicon Transistor-Tip by Electron-Acoustic Microscopy
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