Mechanism of Molten KOH Etching of SiC Single Crystals : Comparative Study with Thermal Oxidation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-08-15
著者
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TAKAHASHI Jun
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Takahashi J
Advanced Technology Research Laboratories Nippon Steel Corporation
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Katsuno Masakazu
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Ohtani Noboru
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Yashiro Hirokatsu
Advanced Technology Research Laboratories, Nippon Steel Corporation
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Kanaya Masatoshi
Advanced Technology Research Laboratories, Nippon Steel Corporation
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TAKAHASHI Jun
Fujitsu Kansai-Chubu Net-Tech Limited
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Ohtani Noboru
Advanced Technology Research Laboratories Nippon Steel Corporation
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Kanaya M
Ion Engineering Res. Inst. Corp. Osaka Jpn
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Yashiro Hirokatsu
Advanced Technology Research Laboratories Nippon Steel Corporation
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Takahashi J
Fujitsu Kansai-chubu Net-tech Limited
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