Simulation of Ion Trajectories near Submicron-Patterned Surface Including Effects of Local Charging and Ion Drift Velocity toward Wafer (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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西川 恵子
千葉大学大学院融合科学研究科
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西川 恵子
千葉大
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TUDA Mutumi
Ad Advanced Technology R〓D Center, Mitsubishi Electric Corporation
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TUDA Mutumi
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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OOMORI Tatsuo
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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NAMBA Keisuke
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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Ootera Hiroki
Semiconductor Research Laboratory, Mitsubishi Electric Corporation
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Ootera H
Mitsubishi Electric Corp. Hyogo Jpn
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Namba K
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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Tuda M
Mitsubishi Electric Corp. Hyogo Jpn
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Tuda Mutumi
Semiconductor Research Laboratory Mitsubishi Electric Corporation
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Oomori T
Mitsubishi Electric Corp. Hyogo Jpn
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Tsuda M
Faculty Of Pharmaceutical Sciences Chiba University
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