A Highly-Sensitive Dry Developable Resist
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-02-20
著者
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Nakane H
Department Of Electrical Engineering Kogakuin University
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Tsuda M
Chiba Univ. Chiba Jpn
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Tsuda Minoru
Laboratory Of Biophysical Chemistry Faculty Of Pharmaceutical Sciences Chiba University
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Tsuda Minoru
Laboratory Of Physical Chemistry Pharmaceutical Sciences Chiba University
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Tsuda Minoru
Laboratory Of Bio-physical Chemistry Faculty Of Pharmaceutical Sciences Chiba University
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Yokota Akira
Tokyo Ohka Kogyo Co. Ltd.
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Oikawa Setsuko
Laboratory of Physical Chemistry, Pharmaceutical Sciences, Chiba University
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Yabuta Mitsuo
Tokyo Ohka Kogyo Co. Ltd.
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Nakane Hisashi
Tokyo Ohka Kogyo Co. Ltd.
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Yokota Akitoshi
Energy Conversion Laboratories Sharp Corporation
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Oikawa Soichi
Department Of Electronics Nagoya University
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Oikawa S
New Materials Research Center Sanyo Electric Co. Ltd.
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Oikawa S
Chiba Univ. Chiba Jpn
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Oikawa Setsuko
Laboratory Of Physical Chemistry Pharmaceutical Sciences Chiba University
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Oikawa Setsuko
Laboratory Of Bio-physical Chemistry Faculty Of Pharmaceutical Sciences Chiba University
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Tsuda M
Faculty Of Pharmaceutical Sciences Chiba University
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- Thickness Dependence of Giant Magnetoresistance in Granular Materials
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- Kerr Rotation of Quenched High-Temperature-Phase MnBi Film
- In Situ Fourier Transform Infrared Measurements of Si Surface and Bulk Plasmas in Cl_2/O_2 and HBr/O_2 Electron Cyclotron Resonance Plasma Etching: Influence of Oxygen on Reaction Products
- In situ Monitoring of Product Species in Plasma Etching by Fourier Transform Infrared Absorption Spectroscopy
- Anisotropic Etching of n^+-Polysilicon Using Beam Plasmas Generated by Gas Puff Plasma Sources
- Chemical Kinetics of Chlorine in Electron Cyclotron Resonance Plasma Etching of Si ( Plasma Processing)
- Multicusp Electron-Cyclotron-Resonance Plasma Source Working with Microwaves Radially Injected through an Annular Slit
- Measurement of the Cl Atom Concentration in RF Chlorine Plasmas by Two-Photon Laser-Induced Fluorescence
- Analysis of Light-Induced Degradation in Amorphous Silicon Alloy Solar Cells and Its Application to Accelerated Test Method
- Etching for 0.15-μm-Level Patterns with Low Microloading Effect Using Beam Plasmas Generated by Gas Puff Plasma Sources
- Simulation of Ion Trajectories near Submicron-Patterned Surface Including Effects of Local Charging and Ion Drift Velocity toward Wafer ( Plasma Processing)
- Origin of the Primary Kinetic Hydrogen Isotope Effects on N-dealkylation from N-alkylamine by Hemoproteins
- Catalytic Mechanism of Class A β-Lactamase. I. The Role of Glu166 and Ser130 in the Deacylation Reaction
- Theoretical Analysis of Charge Confinement in Metal Microclusters
- Formation of Al Clusters Grown on the Hydrogenated Diamind Surfaces
- Al Adatom Migration on the Partly H-Terminated Si (111) Surface
- Proposal of a Micro-Fabrication Process for Al Nanostructures ( Quantum Dot Structures)
- Epitaxial Growth Mechanism of the (100) As Surface of GaAs : The Effect of Positive Holes : Condensed Matter
- On the Reaction Mechanism of the Pyrolyses of TMG and TEG in MOCVD Growth Reactors
- Large Amplitude Shock Waves Having Negative Potential Well in a Plasma with Negative Ions
- On Large Amplitude Ion Acoustic Solitons in Plasma with Negative Ions
- Effect of Channel Implantation on the Device Performance of Low Temperature Processed Polycrystalline Silicon Thin Film Transistors
- Frequency Dependence of Resistivity of High-Purity Copper at Low Temperatures
- The Importance of the Positively Charged Surface for the Epitaxial Growth of Diamonds at Low Pressure