Theoretical Evaluation of a Topographic Contrast of Scanning Electron Microscope Images

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-11-30

著者

• FUJIWARA Takumi

  Department of Applied Physics, Tohoku University

• Fujiwara Tamiya

  Deparment Of Electrical And Electronic Engineering Iwate University

• Fujiwara T

  Department Of Electrical Engineering Faculty Of Engineering Iwate University

• 小寺 正敏

  大阪工業大学

• Suga H

  Mitsubishi Materials Silicon Corp. Chiba Jpn

• Suga Hiroshi

  Department Of Electronic Engineering Osaka Instituted Of Technology

• Suga H

  Kinki Univ. Higashi‐osaka Jpn

• Suga H

  Osaka Inst. Technol. Hirakata Jpn

• KOTERA Masatoshi

  Department of Electronic Engineering, Faculty of Engineering, Osaka Institute of Technology

• Suga Hiroshi

  Department Of Chemistry Faculty Of Science University Of Osaka

• Suga Hiroshi

  Information Science Osaka Institute Of Technology

• Kanai Nobuhiro

  Department Of Electronic Engineering Osaka Instituted Of Technology

• FUJIWARA Takafumi

  Department of Electronic Engineering, Osaka Institute of Technology

• Kotera Masatoshi

  Department Of Electronic Engineering Osaka Institute Of Technology

• Fujiwara Takumi

  Dep. Of Applied Physics Tohoku Univ.

• Suga Hiroshi

  Department Of Chemistry Faculty Of Science Osaka University

• Suga Hiroshi

  Department of Chemistry and Chemical Thermodynamics Laboratory, Faculty of Science, Osaka University

関連論文

• Characteristics of an Ion Beam in a Magnetically Expanding Plasma using Permanent Magnets
• Raman spectroscopic study of benitoite-type compounds(Glass and Ceramic Materials for Photonics)
• Optical characteristics of nanocrystallized glass fiber with second-order optical nonlinearity
• Comprehensive study of crystallization and phase formation in (La,Gd) BGeO_5 glass(Glass and Ceramic Materials for Photonics)
• Novel Technique for Fabrication of Nanoparticle Structures in KNbO3-TeO2 Glass for Photonic Integrated Circuits (Selected Topics in Applied Physics(5)Photonic Crystals and Related Photonic Nanostructures)
• Origin of Intrinsic Second-Harmonic Generation in Crystallized GeO_2-SiO_2 Glass Films
• Electrical Breakdown Assisted by Shock Wave in Benzene
• Reflection-Induced Light Correlation in Spontaneous Emission in Front of a Mirror
• Laser Emission from Dye-Doped Small Spheres by Ultraviolet N_2 Laser Pumping
• Investigation of the Transient Glow Discharge in Nitrogen
• Measurement of Time Lag of Electrical Breakdown in Polymethylmathacrylate under Highly Non-Uniform Field Using Nanosecond Pulse Voltage
• High Photoluminescent Property of Low-Melting Sn-Doped Phosphate Glass
• Correlation between the temperature of molten state and the SH intensity of 30BaO・15TiO_2・55GeO_2 crystallized glass
• Anomalous Boson Behavior and Nanometric Heterogeneity in Glassy Fresnoite
• Blue photoluminescence of germania-stabilized benitoite(Glass and Ceramic Materials for Photonics)
• Formation of fresnoite-type Ba_2TiGe_2O_8 crystallites in BaO-TiO_2-GeO_2 glass thin film and its optical nonlinearity(Glass and Ceramic Materials for Photonics)
• Crystallization behavior of optical fibers with multi layered structure for nonlinear optical devices(Glass and Ceramic Materials for Photonics)
• Fabrication of BaO-TiO_2-GeO_2-SiO_2 based glass fiber(Glass and Ceramic Materials for Photonics)
• Afterglow in synthetic bazirite, BaZrSi_3O_9
• 電子ビーム照射に伴う絶縁物帯電のシミュレーション
• 部分一括露光方式電子ビームリソグラフィ用シュミレータの開発
• セルプロジェクション方式電子ビームリソグラフィのシミュレータ開発
• 電子ビーム照射に伴う絶縁物帯電のシミュレーション
• Electrical Breakdown at the Falling Edge of Rectangular Pulse Voltage Curve in Cyclohexane under Nonuniform Field Configuration
• An Improved Electron Scattering Simulation at the Mask in a Projection Lithography System
• Use of an Electrode Coated with a Thin CuI Layer for Supplying Initial Electrons in Gaseous Discharge
• Dynamic Simulation of Electron-Beam-Induced Chargingup of Insulators
• Estimation of the Surface Magnetic Structure of Materials by Scanning Electron Microscopy
• Observation Technique of Surface Magnetic Structure Using Type-I Magnetic Contrast in the Scanning Electron Microscope
• Formation of spherulite and metastable phase in stoichiometric Ba2Si3O8 glass
• Inelastic light scattering from nanocrystallizing niobiotellurite glass: an insight into the metastable phase and phase-transformation dynamics
• スピン偏極走査電子顕微鏡における磁区コントラストの解析
• Mott検出器の高感度化に関する研究
• Mott電子スピン編極検出器の性能解析
• Second-Order Optical Nonlinearity of LaBGeO_5, LiBGe04 and Ba_2TiGe_2O_8 Crystals in Corresponding Crystallized Glasses : Optics and Quantum Electronics
• Ferroelectric Properties and Second Harmonic Intensities of Stillwellite-Type (La, Ln)BGeO_5 Crystallized Glasses(Optical Properties of Condensed Matter)
• Phase Transitions in the Quinol Clathrate Compounds. I. : The Quinol Hydrogen Cyanide Clathrate Compound
• An Optical Method for Detecting Torsion in a Power Transmission Shaft in Realtime
• A Phase Transition in the Quinol Hydrogen Cyanide Clathrate Compound
• A Phase Transition and Dielectric Absorption in the Quinol Methanol Clathrate Compound
• Cloth Weft Densitometer Using a CCD Camera
• Cloth Weft Counter System by Laser Light for Industrial Use
• Magnetic and Thermal Properties of Crystals Including Isolated Clusters. : I. Heat Capacity and Infrared Spectrum of [Cr_3O(CH_3COO)_6(H_2O)_3]Cl・6H_2O Crystal between 1.5 and 280 K
• Analysis of the Spin Polarization of Secondary Electrons Emitted from Permalloy Polycrystals
• A Simulation of Electron Scattering in Magnetic Materials
• Evaluation of the Mott Polarimeter in the Electron Spin Polarization Scanning Electron Microscopy
• Theoretical Evaluation of Compositional Contrast of Scanning Electron Microscope Images
• Theoretical Evaluation of a Topographic Contrast of Scanning Electron Microscope Images : Inspection and Testing
• Theoretical Evaluation of a Topographic Contrast of Scanning Electron Microscope Images
• A Simulation of Electron Scattering in Metals : Inspection and Testing
• A Simulation of the Topographic Contrast in the SEM : Inspection and Testing
• A Simulation of the Topographic Contrast in the SEM
• A Simulation of Electron Scattering in Metals
• Bio-TEMのエネルギーフィルタリングによる解像度の改善
• Analysis of Charging Effect During Observation of Trench Structures by Seanrting Electron Microscope
• Simulation of Scanning Electron Microscope Image for Trench Structures
• 28. Experience of Stereotaxic Radio-Gasserian-Gangliotomy by Linac Irradiation and Its Basic Experiment
• サマリー・アブストラクト
• 電子ビームリソグラフィの精度解析
• 低露光量電子ビームリソグラフィにおけるレジストパターンエッジラフネスへの電子散乱の影響(半導体エレクトロニクス)
• B-5-75 DS-CDMA移動通信における符号合成RAKE受信方式
• Characteristic Variation of Exposure Pattern in Cell-Projection Electron-Beam Lithography
• SEM情報の活用とその進歩
• 電子ビーム照射に伴う絶縁物試料の帯電現象のシミュレーション
• 空気中試料分析装置へのOligo散乱ビームの応用 : Oligo散乱ビームのモンテカルロシミュレーション
• Type-I磁気コントラストを用いた磁性体表面の磁区構造解析
• Warp of Czochralski Wafer with Back-Surface Polycrystalline Silicon Film
• 空気中試料観測用電子ビーム分析装置の検討
• 空気中試料観測用電子顕微鏡の可能性 第2報
• 空気中における電子ビーム分析機器の検討
• 空気中試料観測用電子顕微鏡の可能性
• High efficient white light emission of rare earth-free MnO–SnO–ZnO–P2O5 glass
• 走査電子顕微鏡像のシミュレ-ション
• 相対論的波動方程式に基づいた中心力場における電子散乱断面積の計算
• 静電型走査電子顕微鏡の製作
• 走査型電子顕微鏡を用いた電子ビ-ムテスティング技術について
• Origin of photoluminescence in suzukiite-type BaTiSi_2O_7(Glass and Ceramic Materials for Photonics)
• A Calorimetric Study of Heavy Meromyosin ATPase
• Line Edge Roughness of Developed Resist with Low-Dose Electron Beam Exposu
• Analysis of the Image Formation Mechanism on High Energy Scanning Electron Microscopy
• Simulation of Fogging Electrons in Electron Beam Lithography
• Complementary Role of Thermal Analysis and Calorimetry
• Monte Carlo Calculations on the Passage of Electrons through Thin Films Irradiated by 300 keV Electrons
• Extreme Ultraviolet Lithography Simulation by Tracing Photoelectron Trajectories in Resist
• Calculation of Coulomb Interaction among Electrons in a High-Current Electron-Beam Exposure System
• Influence of Electron Scattering on Resolution in Low-Dose Electron-Beam Lithography
• Experimental Study on Heat Flux from an Argon RF Plasma Using Laser Interferometry Method
• The Phase Transition of Crystalline Potassium Thiocyanate, KSCN. I. Thermal and Infrared Studies
• On the Orientational Order-Disorder Transition in Crystalline Aniline Hydrobromide
• Construction of an adiabatic calorimeter workable under constant high-pressure.
• Physico-chemical Studies of the Reversible and Irreversible Phase Transitions in Potassium Ferrocyanide Trihydrate and Its Deuterate Analogue
• Thermodynamic study of NH4Br and ND4Br crystals under constant high-pressures.
• A Monte Carlo Simulation of Secondary Electron Trajectories in a Specimen
• Construction of an adiabatic high-pressure calorimeter using helium gas for pressurization.
• Mechanism of the ferroelectric phase transition in K4[Fe(CN)6] 3H2O and K4[Fe(CN)6] 3D2O.
• Calorimetric study of the glassy state. XV. Thermodynamic study of pinacol hexahydrate and pinacol-d2 hexadeuterate.
• Phase Transition and Glass Transitions in Isocyanocyclohexane Studied by a Polaro-Calorimeter.
• Magnetic and Thermal Properties of Crystals Including Isolated Clusters. II. Heat Capacity of Co3(C5H5)3S2 from 15 to 270 K and Mechanism of Phase Transition
• Phase transition of SnCl2(H2O)x(D2O)2-x as studied by high resolution heat capacity measurement.
• The Heat Capacity and the Phase Transition of the [(C6H5)3PCH3]+ (TCNQ)2− Crystal

もっと見る 閉じる

スポンサーリンク