Characteristics of an Ion Beam in a Magnetically Expanding Plasma using Permanent Magnets
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概要
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Generation of a supersonic ion beam is observed in a low-pressure solenoid-free plasma expanded by permanent magnet arrays. By employing double concentric arrays of permanent magnets, a constant field area of about 100 G in a source tube, and a diverging magnetic field near the exit of the plasma source can be generated, where the source consists of a 6.5-cm-diameter glass tube and a double-turn rf loop antenna. The 13.56 MHz rf power is maintained at 250 W and the operating argon gas pressure can be changed from about 0.3 . 2.5 mTorr. Ion energy distribution function is measured by a combination of a retarding field energy analyzer and a pulsed probe technique. As a result, it is found that the beam energy can be increased up to about 40 eV with a decrease in the operating gas pressure.
著者
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Fujiwara Tamiya
Department Of Electrical Engineering Faculty Of Engineering Iwate University
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Fujiwara Tamiya
Department Of Electrical And Electronic Engineering Iwate University
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TAKAHASHI Kazunori
Department of Electrical and Electronic Engineering, Iwate University
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Takahashi Kazunori
Iwate Univ. Morioka Jpn
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Takahashi Kazunori
Department Of Electrical And Electronic Engineering Iwate University
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Fujiwara Tamiya
Deparment Of Electrical And Electronic Engineering Iwate University
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