A Monte Carlo Simulation of Secondary Electron Trajectories in a Specimen
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概要
- 論文の詳細を見る
The secondary electron generation and the electron cascades are simulated by a Monte Carlo calculation along the incident primary electron trajectories in a specimen. The calculated energy distribution of the emitted slow electrons from the specimen surface is in good agreement with the experimental results and other calculated results.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-01-20
著者
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Kotera Masatoshi
Department Of Electronic Engineering Osaka Institute Of Technology
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Kishida Takenobu
Department of Electronic Engineering, Osaka Institute of Technology, Omiya, Asahi-ku, Osaka 535
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Kotera Masatoshi
Department of Electronic Engineering, Osaka Institute of Technology, Omiya, Asahi-ku, Osaka 535
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