114 近距離場音場浮揚を用いた非接触搬送方法の位置決め精度向上の検討

概要

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The near-field acoustic levitation (NFAL) phenomena has been applied to the realization of a non-contact transportation system for a LCD glass substrate or a Si wafer. Two kinds of transportation system are proposed. One is transported by a flexural traveling vibration and the other is transported by a flexural standing vibration with a linear pulse motor stage. Although the system using a flexural standing vibration is superior to positioning and the freedom of the transportation route the transportation speed is not sufficient to the application in the former studies. In this report a 40kHz transducer is applied to using 20kHz transducer the system using 40kHz one achieves the same levitation characteristics and is superior to downsizing, silence and light weighting. The transportation system with 40kHz transducer and a linear stage can be realized the faster transportation.
一般社団法人日本機械学会の論文
2003-06-04