427 原子間力顕微鏡を用いた有機感光ポリマーのナノスケール光加工(光メカトロニクスI)(OS.6 ナノ構造創成をめざす光メカトロニクスの展開)

概要

論文の詳細を見る
This paper describes a novel local surface modification method of an organic photosensitive polymer using an atomic force microscopy. As organic photosensitive polymer, urethane-urea copolymer was employed. Topography of the copolymer containing an azo dye can be modulated by the intensity distribution of the light. The surface of the copolymer film was locally fabricated by strong near field optical source generated at the edge of the metal coated tip due to a strong field enhancement effect under laser illumination. The successfully fabricated dot patterns have been investigated about the relationship of the dot depth and light illumination time. Those experimental systems and results presented here are conceivable for high density storage and nanometer-scale fabrication of polymer material.
社団法人日本機械学会の論文
2001-03-09