変位補正機能付き走査型トンネル顕微鏡

概要

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This paper describes a new scanning tunneling microscope (STM) system with a displacement correction mechanism. Precision two-dimensional positioning of our STM instrument is achieved with a monolithic parallel spring. Therefore, the mutual interference effect of two-dimensional displacements is negligible. And then, the nonlinearity caused by piezoelectric element hysteresis is measured using a semiconductor-laser interferometer, which is used wavelength modulation using injection current modulation. The displacement correction is achieved by this interferometer. Highly oriented pyrolytic graphite and optical disk surfaces are observed by our STM, and in the case of the optical disk the distortion of the STM topography and the size between tracks are corrected with the interferometer signal.
公益社団法人精密工学会の論文
1993-01-05