シングルスリットを用いた鏡面反射率による表面粗さ測定の研究

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This paper describes the measurement method of surface roughness by specular reflectance Sr using a single slit. The reflectance is calculated by the ratio of incidence to reflection light and linearly decreases with increasing the surface roughness parameter Ra. The reflected light need to be measured at a regular angle of the diffraction pattern because the illuminated light at the rough surface scatters around the angle. The measurements of Sr are carried out with some specimens of metal and nonmetal. The measured results of Sr were accord with approximate line of a linear equation of Ra at the incident angle larger than 75°. By analyzing an approximate line, the measurable domain of Ra can be selected by the complementary angle Θi of incident angle φi.
公益社団法人精密工学会の論文